12/12/2010	2:02:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2010	2:02:44 PM	Recipe started at 2:02 PM
12/12/2010	2:02:44 PM	H2 valve closed
12/12/2010	2:02:44 PM	BCl3 valve closed
12/12/2010	2:02:44 PM	PH3 valve closed
12/12/2010	2:02:44 PM	SiCl4 pre valve closed
12/12/2010	2:02:44 PM	SiCl4 post valve closed
12/12/2010	2:02:44 PM	Main Vac valve closed
12/12/2010	2:02:44 PM	Bypass valve closed
12/12/2010	2:02:44 PM	Bubbler valve closed
12/12/2010	2:02:44 PM	Helium valve opened
12/12/2010	2:02:44 PM	Helium MFC set to  500.000000
12/12/2010	2:02:44 PM	H2 MFC set to  0.000000
12/12/2010	2:02:44 PM	BCl3 MFC set to  0.000000
12/12/2010	2:02:44 PM	PHl3 MFC set to  0.000000
12/12/2010	2:02:44 PM	SiCl4 MFC set to  0.000000
12/12/2010	2:02:44 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	2:02:45 PM	Tube furnace set to 0
12/12/2010	2:04:05 PM	Helium valve closed
12/12/2010	2:04:05 PM	H2 valve closed
12/12/2010	2:04:05 PM	BCl3 valve closed
12/12/2010	2:04:05 PM	PH3 valve closed
12/12/2010	2:04:05 PM	SiCl4 pre valve closed
12/12/2010	2:04:05 PM	SiCl4 post valve closed
12/12/2010	2:04:05 PM	Main Vac valve closed
12/12/2010	2:04:05 PM	Bypass valve closed
12/12/2010	2:04:05 PM	Bubbler valve closed
12/12/2010	2:04:05 PM	Helium MFC set to  0.000000
12/12/2010	2:04:05 PM	H2 MFC set to  0.000000
12/12/2010	2:04:05 PM	BCl3 MFC set to  0.000000
12/12/2010	2:04:05 PM	PHl3 MFC set to  0.000000
12/12/2010	2:04:05 PM	SiCl4 MFC set to  0.000000
12/12/2010	2:04:05 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	2:04:05 PM	Tube furnace set to 0
12/12/2010	2:04:05 PM	Run finished at 2:04 PM
12/12/2010	2:04:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2010	2:13:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2010	2:13:31 PM	Recipe started at 2:13 PM
12/12/2010	2:13:32 PM	Helium valve closed
12/12/2010	2:13:32 PM	H2 valve closed
12/12/2010	2:13:32 PM	BCl3 valve closed
12/12/2010	2:13:32 PM	PH3 valve closed
12/12/2010	2:13:32 PM	SiCl4 pre valve closed
12/12/2010	2:13:32 PM	SiCl4 post valve closed
12/12/2010	2:13:32 PM	Main Vac valve closed
12/12/2010	2:13:32 PM	Bubbler valve closed
12/12/2010	2:13:32 PM	Bypass valve opened
12/12/2010	2:13:32 PM	Helium MFC set to  0.000000
12/12/2010	2:13:32 PM	H2 MFC set to  0.000000
12/12/2010	2:13:32 PM	BCl3 MFC set to  0.000000
12/12/2010	2:13:32 PM	PHl3 MFC set to  0.000000
12/12/2010	2:13:32 PM	SiCl4 MFC set to  0.000000
12/12/2010	2:13:32 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	2:13:32 PM	Tube furnace set to 0
12/12/2010	2:14:15 PM	Run aborted at 2:14 PM
12/12/2010	2:14:15 PM	Helium valve closed
12/12/2010	2:14:15 PM	H2 valve closed
12/12/2010	2:14:15 PM	BCl3 valve closed
12/12/2010	2:14:15 PM	PH3 valve closed
12/12/2010	2:14:15 PM	SiCl4 pre valve closed
12/12/2010	2:14:15 PM	SiCl4 post valve closed
12/12/2010	2:14:15 PM	Bypass valve closed
12/12/2010	2:14:15 PM	Main Vac valve closed
12/12/2010	2:14:15 PM	Bubbler valve closed
12/12/2010	2:14:15 PM	Helium MFC set to  0.000000
12/12/2010	2:14:15 PM	H2 MFC set to  0.000000
12/12/2010	2:14:15 PM	BCl3 MFC set to  0.000000
12/12/2010	2:14:15 PM	PHl3 MFC set to  0.000000
12/12/2010	2:14:15 PM	SiCl4 MFC set to  0.000000
12/12/2010	2:14:16 PM	Tube furnace set to 0
12/12/2010	2:14:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2010	2:14:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2010	2:14:49 PM	Recipe started at 2:14 PM
12/12/2010	2:14:49 PM	Helium valve closed
12/12/2010	2:14:49 PM	H2 valve closed
12/12/2010	2:14:49 PM	BCl3 valve closed
12/12/2010	2:14:49 PM	PH3 valve closed
12/12/2010	2:14:49 PM	SiCl4 pre valve closed
12/12/2010	2:14:49 PM	SiCl4 post valve closed
12/12/2010	2:14:49 PM	Main Vac valve closed
12/12/2010	2:14:49 PM	Bubbler valve closed
12/12/2010	2:14:49 PM	Bypass valve opened
12/12/2010	2:14:49 PM	Helium MFC set to  0.000000
12/12/2010	2:14:49 PM	H2 MFC set to  0.000000
12/12/2010	2:14:49 PM	BCl3 MFC set to  0.000000
12/12/2010	2:14:49 PM	PHl3 MFC set to  0.000000
12/12/2010	2:14:49 PM	SiCl4 MFC set to  0.000000
12/12/2010	2:14:49 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	2:14:49 PM	Tube furnace set to 0
12/12/2010	2:15:19 PM	Run aborted at 2:15 PM
12/12/2010	2:15:19 PM	Helium valve closed
12/12/2010	2:15:19 PM	H2 valve closed
12/12/2010	2:15:19 PM	BCl3 valve closed
12/12/2010	2:15:19 PM	PH3 valve closed
12/12/2010	2:15:19 PM	SiCl4 pre valve closed
12/12/2010	2:15:19 PM	SiCl4 post valve closed
12/12/2010	2:15:19 PM	Bypass valve closed
12/12/2010	2:15:19 PM	Main Vac valve closed
12/12/2010	2:15:19 PM	Bubbler valve closed
12/12/2010	2:15:19 PM	Helium MFC set to  0.000000
12/12/2010	2:15:19 PM	H2 MFC set to  0.000000
12/12/2010	2:15:19 PM	BCl3 MFC set to  0.000000
12/12/2010	2:15:19 PM	PHl3 MFC set to  0.000000
12/12/2010	2:15:19 PM	SiCl4 MFC set to  0.000000
12/12/2010	2:15:20 PM	Tube furnace set to 0
12/12/2010	2:15:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2010	2:16:29 PM	Bypass valve opened
12/12/2010	2:16:36 PM	Bypass valve closed
12/12/2010	2:16:38 PM	Bypass valve opened
12/12/2010	2:16:45 PM	Bypass valve closed
12/12/2010	2:16:48 PM	Bypass valve opened
12/12/2010	2:17:38 PM	Main Vac valve opened
12/12/2010	2:17:48 PM	Tube furnace set to 200
12/12/2010	2:20:41 PM	Main Vac valve closed
12/12/2010	2:20:43 PM	Bypass valve closed
12/12/2010	2:20:49 PM	Bypass valve opened
12/12/2010	2:20:50 PM	Main Vac valve opened
12/12/2010	2:31:31 PM	Main Vac valve closed
12/12/2010	2:31:34 PM	Bypass valve closed
12/12/2010	2:31:46 PM	Bypass valve opened
12/12/2010	2:31:48 PM	Main Vac valve opened
12/12/2010	2:59:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/12/2010	2:59:24 PM	Recipe started at 2:59 PM
12/12/2010	2:59:24 PM	Helium valve closed
12/12/2010	2:59:24 PM	H2 valve closed
12/12/2010	2:59:24 PM	BCl3 valve closed
12/12/2010	2:59:24 PM	PH3 valve closed
12/12/2010	2:59:24 PM	SiCl4 pre valve closed
12/12/2010	2:59:24 PM	SiCl4 post valve closed
12/12/2010	2:59:24 PM	Main Vac valve closed
12/12/2010	2:59:24 PM	Bubbler valve closed
12/12/2010	2:59:24 PM	Bypass valve opened
12/12/2010	2:59:24 PM	Helium MFC set to  0.000000
12/12/2010	2:59:24 PM	H2 MFC set to  0.000000
12/12/2010	2:59:24 PM	BCl3 MFC set to  0.000000
12/12/2010	2:59:24 PM	PHl3 MFC set to  0.000000
12/12/2010	2:59:24 PM	SiCl4 MFC set to  0.000000
12/12/2010	2:59:24 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	2:59:24 PM	Tube furnace set to 0
12/12/2010	2:59:24 PM	Helium valve closed
12/12/2010	2:59:24 PM	H2 valve closed
12/12/2010	2:59:24 PM	BCl3 valve closed
12/12/2010	2:59:24 PM	PH3 valve closed
12/12/2010	2:59:24 PM	SiCl4 pre valve closed
12/12/2010	2:59:24 PM	SiCl4 post valve closed
12/12/2010	2:59:24 PM	Bubbler valve closed
12/12/2010	2:59:24 PM	Main Vac valve opened
12/12/2010	2:59:24 PM	Bypass valve opened
12/12/2010	2:59:24 PM	Helium MFC set to  0.000000
12/12/2010	2:59:24 PM	H2 MFC set to  0.000000
12/12/2010	2:59:24 PM	BCl3 MFC set to  0.000000
12/12/2010	2:59:24 PM	PHl3 MFC set to  0.000000
12/12/2010	2:59:24 PM	SiCl4 MFC set to  0.000000
12/12/2010	2:59:24 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	2:59:24 PM	Tube furnace set to 0
12/12/2010	3:00:24 PM	H2 valve closed
12/12/2010	3:00:24 PM	BCl3 valve closed
12/12/2010	3:00:24 PM	PH3 valve closed
12/12/2010	3:00:24 PM	SiCl4 pre valve closed
12/12/2010	3:00:24 PM	SiCl4 post valve closed
12/12/2010	3:00:24 PM	Bubbler valve closed
12/12/2010	3:00:24 PM	Helium valve opened
12/12/2010	3:00:24 PM	Main Vac valve opened
12/12/2010	3:00:24 PM	Bypass valve opened
12/12/2010	3:00:24 PM	Helium MFC set to  100.000000
12/12/2010	3:00:24 PM	H2 MFC set to  0.000000
12/12/2010	3:00:24 PM	BCl3 MFC set to  0.000000
12/12/2010	3:00:24 PM	PHl3 MFC set to  0.000000
12/12/2010	3:00:24 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:00:24 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:00:24 PM	Tube furnace set to 0
12/12/2010	3:01:24 PM	Helium valve closed
12/12/2010	3:01:24 PM	H2 valve closed
12/12/2010	3:01:24 PM	BCl3 valve closed
12/12/2010	3:01:24 PM	PH3 valve closed
12/12/2010	3:01:24 PM	SiCl4 pre valve closed
12/12/2010	3:01:24 PM	SiCl4 post valve closed
12/12/2010	3:01:24 PM	Bubbler valve closed
12/12/2010	3:01:24 PM	Main Vac valve opened
12/12/2010	3:01:24 PM	Bypass valve opened
12/12/2010	3:01:24 PM	Helium MFC set to  0.000000
12/12/2010	3:01:24 PM	H2 MFC set to  0.000000
12/12/2010	3:01:24 PM	BCl3 MFC set to  0.000000
12/12/2010	3:01:24 PM	PHl3 MFC set to  0.000000
12/12/2010	3:01:24 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:01:24 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:01:25 PM	Tube furnace set to 0
12/12/2010	3:02:25 PM	H2 valve closed
12/12/2010	3:02:25 PM	BCl3 valve closed
12/12/2010	3:02:25 PM	PH3 valve closed
12/12/2010	3:02:25 PM	SiCl4 pre valve closed
12/12/2010	3:02:25 PM	SiCl4 post valve closed
12/12/2010	3:02:25 PM	Bubbler valve closed
12/12/2010	3:02:25 PM	Helium valve opened
12/12/2010	3:02:25 PM	Main Vac valve opened
12/12/2010	3:02:25 PM	Bypass valve opened
12/12/2010	3:02:25 PM	Helium MFC set to  100.000000
12/12/2010	3:02:25 PM	H2 MFC set to  0.000000
12/12/2010	3:02:25 PM	BCl3 MFC set to  0.000000
12/12/2010	3:02:25 PM	PHl3 MFC set to  0.000000
12/12/2010	3:02:25 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:02:25 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:02:25 PM	Tube furnace set to 0
12/12/2010	3:03:25 PM	Helium valve closed
12/12/2010	3:03:25 PM	H2 valve closed
12/12/2010	3:03:25 PM	BCl3 valve closed
12/12/2010	3:03:25 PM	PH3 valve closed
12/12/2010	3:03:25 PM	SiCl4 pre valve closed
12/12/2010	3:03:25 PM	SiCl4 post valve closed
12/12/2010	3:03:25 PM	Bubbler valve closed
12/12/2010	3:03:25 PM	Main Vac valve opened
12/12/2010	3:03:25 PM	Bypass valve opened
12/12/2010	3:03:25 PM	Helium MFC set to  0.000000
12/12/2010	3:03:25 PM	H2 MFC set to  0.000000
12/12/2010	3:03:25 PM	BCl3 MFC set to  0.000000
12/12/2010	3:03:25 PM	PHl3 MFC set to  0.000000
12/12/2010	3:03:25 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:03:25 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:03:25 PM	Tube furnace set to 0
12/12/2010	3:04:25 PM	H2 valve closed
12/12/2010	3:04:25 PM	BCl3 valve closed
12/12/2010	3:04:25 PM	PH3 valve closed
12/12/2010	3:04:25 PM	SiCl4 pre valve closed
12/12/2010	3:04:25 PM	SiCl4 post valve closed
12/12/2010	3:04:25 PM	Bubbler valve closed
12/12/2010	3:04:25 PM	Helium valve opened
12/12/2010	3:04:25 PM	Main Vac valve opened
12/12/2010	3:04:25 PM	Bypass valve opened
12/12/2010	3:04:25 PM	Helium MFC set to  100.000000
12/12/2010	3:04:25 PM	H2 MFC set to  0.000000
12/12/2010	3:04:25 PM	BCl3 MFC set to  0.000000
12/12/2010	3:04:25 PM	PHl3 MFC set to  0.000000
12/12/2010	3:04:25 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:04:25 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:04:25 PM	Tube furnace set to 0
12/12/2010	3:05:25 PM	Helium valve closed
12/12/2010	3:05:25 PM	H2 valve closed
12/12/2010	3:05:25 PM	BCl3 valve closed
12/12/2010	3:05:25 PM	PH3 valve closed
12/12/2010	3:05:25 PM	SiCl4 pre valve closed
12/12/2010	3:05:25 PM	SiCl4 post valve closed
12/12/2010	3:05:25 PM	Bubbler valve closed
12/12/2010	3:05:25 PM	Main Vac valve opened
12/12/2010	3:05:25 PM	Bypass valve opened
12/12/2010	3:05:25 PM	Helium MFC set to  0.000000
12/12/2010	3:05:25 PM	H2 MFC set to  0.000000
12/12/2010	3:05:25 PM	BCl3 MFC set to  0.000000
12/12/2010	3:05:25 PM	PHl3 MFC set to  0.000000
12/12/2010	3:05:25 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:05:25 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:05:25 PM	Tube furnace set to 0
12/12/2010	3:06:25 PM	H2 valve closed
12/12/2010	3:06:25 PM	BCl3 valve closed
12/12/2010	3:06:25 PM	PH3 valve closed
12/12/2010	3:06:25 PM	SiCl4 pre valve closed
12/12/2010	3:06:25 PM	SiCl4 post valve closed
12/12/2010	3:06:25 PM	Bubbler valve closed
12/12/2010	3:06:25 PM	Helium valve opened
12/12/2010	3:06:25 PM	Main Vac valve opened
12/12/2010	3:06:25 PM	Bypass valve opened
12/12/2010	3:06:25 PM	Helium MFC set to  100.000000
12/12/2010	3:06:25 PM	H2 MFC set to  0.000000
12/12/2010	3:06:25 PM	BCl3 MFC set to  0.000000
12/12/2010	3:06:25 PM	PHl3 MFC set to  0.000000
12/12/2010	3:06:25 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:06:25 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:06:26 PM	Tube furnace set to 0
12/12/2010	3:07:26 PM	Helium valve closed
12/12/2010	3:07:26 PM	H2 valve closed
12/12/2010	3:07:26 PM	BCl3 valve closed
12/12/2010	3:07:26 PM	PH3 valve closed
12/12/2010	3:07:26 PM	SiCl4 pre valve closed
12/12/2010	3:07:26 PM	SiCl4 post valve closed
12/12/2010	3:07:26 PM	Bubbler valve closed
12/12/2010	3:07:26 PM	Main Vac valve opened
12/12/2010	3:07:26 PM	Bypass valve opened
12/12/2010	3:07:26 PM	Helium MFC set to  0.000000
12/12/2010	3:07:26 PM	H2 MFC set to  0.000000
12/12/2010	3:07:26 PM	BCl3 MFC set to  0.000000
12/12/2010	3:07:26 PM	PHl3 MFC set to  0.000000
12/12/2010	3:07:26 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:07:26 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:07:26 PM	Tube furnace set to 0
12/12/2010	3:08:26 PM	H2 valve closed
12/12/2010	3:08:26 PM	BCl3 valve closed
12/12/2010	3:08:26 PM	PH3 valve closed
12/12/2010	3:08:26 PM	SiCl4 pre valve closed
12/12/2010	3:08:26 PM	SiCl4 post valve closed
12/12/2010	3:08:26 PM	Bubbler valve closed
12/12/2010	3:08:26 PM	Helium valve opened
12/12/2010	3:08:26 PM	Main Vac valve opened
12/12/2010	3:08:26 PM	Bypass valve opened
12/12/2010	3:08:26 PM	Helium MFC set to  100.000000
12/12/2010	3:08:26 PM	H2 MFC set to  0.000000
12/12/2010	3:08:26 PM	BCl3 MFC set to  0.000000
12/12/2010	3:08:26 PM	PHl3 MFC set to  0.000000
12/12/2010	3:08:26 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:08:26 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:08:26 PM	Tube furnace set to 0
12/12/2010	3:09:26 PM	Helium valve closed
12/12/2010	3:09:26 PM	H2 valve closed
12/12/2010	3:09:26 PM	BCl3 valve closed
12/12/2010	3:09:26 PM	PH3 valve closed
12/12/2010	3:09:26 PM	SiCl4 pre valve closed
12/12/2010	3:09:26 PM	SiCl4 post valve closed
12/12/2010	3:09:26 PM	Bubbler valve closed
12/12/2010	3:09:26 PM	Main Vac valve opened
12/12/2010	3:09:26 PM	Bypass valve opened
12/12/2010	3:09:26 PM	Helium MFC set to  0.000000
12/12/2010	3:09:26 PM	H2 MFC set to  0.000000
12/12/2010	3:09:26 PM	BCl3 MFC set to  0.000000
12/12/2010	3:09:26 PM	PHl3 MFC set to  0.000000
12/12/2010	3:09:26 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:09:26 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:09:26 PM	Tube furnace set to 0
12/12/2010	3:10:26 PM	H2 valve closed
12/12/2010	3:10:26 PM	BCl3 valve closed
12/12/2010	3:10:26 PM	PH3 valve closed
12/12/2010	3:10:26 PM	SiCl4 pre valve closed
12/12/2010	3:10:26 PM	SiCl4 post valve closed
12/12/2010	3:10:26 PM	Bubbler valve closed
12/12/2010	3:10:26 PM	Helium valve opened
12/12/2010	3:10:26 PM	Main Vac valve opened
12/12/2010	3:10:26 PM	Bypass valve opened
12/12/2010	3:10:26 PM	Helium MFC set to  100.000000
12/12/2010	3:10:26 PM	H2 MFC set to  0.000000
12/12/2010	3:10:26 PM	BCl3 MFC set to  0.000000
12/12/2010	3:10:26 PM	PHl3 MFC set to  0.000000
12/12/2010	3:10:26 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:10:26 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:10:26 PM	Tube furnace set to 0
12/12/2010	3:11:26 PM	Helium valve closed
12/12/2010	3:11:26 PM	H2 valve closed
12/12/2010	3:11:26 PM	BCl3 valve closed
12/12/2010	3:11:26 PM	PH3 valve closed
12/12/2010	3:11:26 PM	SiCl4 pre valve closed
12/12/2010	3:11:26 PM	SiCl4 post valve closed
12/12/2010	3:11:26 PM	Bubbler valve closed
12/12/2010	3:11:26 PM	Main Vac valve opened
12/12/2010	3:11:26 PM	Bypass valve opened
12/12/2010	3:11:26 PM	Helium MFC set to  0.000000
12/12/2010	3:11:26 PM	H2 MFC set to  0.000000
12/12/2010	3:11:26 PM	BCl3 MFC set to  0.000000
12/12/2010	3:11:26 PM	PHl3 MFC set to  0.000000
12/12/2010	3:11:26 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:11:26 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:11:27 PM	Tube furnace set to 0
12/12/2010	3:12:27 PM	H2 valve closed
12/12/2010	3:12:27 PM	BCl3 valve closed
12/12/2010	3:12:27 PM	PH3 valve closed
12/12/2010	3:12:27 PM	SiCl4 pre valve closed
12/12/2010	3:12:27 PM	SiCl4 post valve closed
12/12/2010	3:12:27 PM	Bubbler valve closed
12/12/2010	3:12:27 PM	Helium valve opened
12/12/2010	3:12:27 PM	Main Vac valve opened
12/12/2010	3:12:27 PM	Bypass valve opened
12/12/2010	3:12:27 PM	Helium MFC set to  100.000000
12/12/2010	3:12:27 PM	H2 MFC set to  0.000000
12/12/2010	3:12:27 PM	BCl3 MFC set to  0.000000
12/12/2010	3:12:27 PM	PHl3 MFC set to  0.000000
12/12/2010	3:12:27 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:12:27 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:12:27 PM	Tube furnace set to 0
12/12/2010	3:13:27 PM	Helium valve closed
12/12/2010	3:13:27 PM	H2 valve closed
12/12/2010	3:13:27 PM	BCl3 valve closed
12/12/2010	3:13:27 PM	PH3 valve closed
12/12/2010	3:13:27 PM	SiCl4 pre valve closed
12/12/2010	3:13:27 PM	SiCl4 post valve closed
12/12/2010	3:13:27 PM	Bubbler valve closed
12/12/2010	3:13:27 PM	Main Vac valve opened
12/12/2010	3:13:27 PM	Bypass valve opened
12/12/2010	3:13:27 PM	Helium MFC set to  0.000000
12/12/2010	3:13:27 PM	H2 MFC set to  0.000000
12/12/2010	3:13:27 PM	BCl3 MFC set to  0.000000
12/12/2010	3:13:27 PM	PHl3 MFC set to  0.000000
12/12/2010	3:13:27 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:13:27 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:13:27 PM	Tube furnace set to 0
12/12/2010	3:14:27 PM	H2 valve closed
12/12/2010	3:14:27 PM	BCl3 valve closed
12/12/2010	3:14:27 PM	PH3 valve closed
12/12/2010	3:14:27 PM	SiCl4 pre valve closed
12/12/2010	3:14:27 PM	SiCl4 post valve closed
12/12/2010	3:14:27 PM	Bubbler valve closed
12/12/2010	3:14:27 PM	Helium valve opened
12/12/2010	3:14:27 PM	Main Vac valve opened
12/12/2010	3:14:27 PM	Bypass valve opened
12/12/2010	3:14:27 PM	Helium MFC set to  100.000000
12/12/2010	3:14:27 PM	H2 MFC set to  0.000000
12/12/2010	3:14:27 PM	BCl3 MFC set to  0.000000
12/12/2010	3:14:27 PM	PHl3 MFC set to  0.000000
12/12/2010	3:14:27 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:14:27 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:14:27 PM	Tube furnace set to 0
12/12/2010	3:15:27 PM	Helium valve closed
12/12/2010	3:15:27 PM	H2 valve closed
12/12/2010	3:15:27 PM	BCl3 valve closed
12/12/2010	3:15:27 PM	PH3 valve closed
12/12/2010	3:15:27 PM	SiCl4 pre valve closed
12/12/2010	3:15:27 PM	SiCl4 post valve closed
12/12/2010	3:15:27 PM	Bubbler valve closed
12/12/2010	3:15:27 PM	Main Vac valve opened
12/12/2010	3:15:27 PM	Bypass valve opened
12/12/2010	3:15:27 PM	Helium MFC set to  0.000000
12/12/2010	3:15:27 PM	H2 MFC set to  0.000000
12/12/2010	3:15:27 PM	BCl3 MFC set to  0.000000
12/12/2010	3:15:27 PM	PHl3 MFC set to  0.000000
12/12/2010	3:15:27 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:15:27 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:15:27 PM	Tube furnace set to 0
12/12/2010	3:16:27 PM	H2 valve closed
12/12/2010	3:16:27 PM	BCl3 valve closed
12/12/2010	3:16:27 PM	PH3 valve closed
12/12/2010	3:16:27 PM	SiCl4 pre valve closed
12/12/2010	3:16:27 PM	SiCl4 post valve closed
12/12/2010	3:16:27 PM	Bubbler valve closed
12/12/2010	3:16:27 PM	Helium valve opened
12/12/2010	3:16:27 PM	Main Vac valve opened
12/12/2010	3:16:27 PM	Bypass valve opened
12/12/2010	3:16:27 PM	Helium MFC set to  100.000000
12/12/2010	3:16:27 PM	H2 MFC set to  0.000000
12/12/2010	3:16:27 PM	BCl3 MFC set to  0.000000
12/12/2010	3:16:27 PM	PHl3 MFC set to  0.000000
12/12/2010	3:16:27 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:16:27 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:16:28 PM	Tube furnace set to 0
12/12/2010	3:17:28 PM	Helium valve closed
12/12/2010	3:17:28 PM	H2 valve closed
12/12/2010	3:17:28 PM	BCl3 valve closed
12/12/2010	3:17:28 PM	PH3 valve closed
12/12/2010	3:17:28 PM	SiCl4 pre valve closed
12/12/2010	3:17:28 PM	SiCl4 post valve closed
12/12/2010	3:17:28 PM	Bubbler valve closed
12/12/2010	3:17:28 PM	Main Vac valve opened
12/12/2010	3:17:28 PM	Bypass valve opened
12/12/2010	3:17:28 PM	Helium MFC set to  0.000000
12/12/2010	3:17:28 PM	H2 MFC set to  0.000000
12/12/2010	3:17:28 PM	BCl3 MFC set to  0.000000
12/12/2010	3:17:28 PM	PHl3 MFC set to  0.000000
12/12/2010	3:17:28 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:17:28 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:17:28 PM	Tube furnace set to 0
12/12/2010	3:18:28 PM	H2 valve closed
12/12/2010	3:18:28 PM	BCl3 valve closed
12/12/2010	3:18:28 PM	PH3 valve closed
12/12/2010	3:18:28 PM	SiCl4 pre valve closed
12/12/2010	3:18:28 PM	SiCl4 post valve closed
12/12/2010	3:18:28 PM	Bubbler valve closed
12/12/2010	3:18:28 PM	Helium valve opened
12/12/2010	3:18:28 PM	Main Vac valve opened
12/12/2010	3:18:28 PM	Bypass valve opened
12/12/2010	3:18:28 PM	Helium MFC set to  100.000000
12/12/2010	3:18:28 PM	H2 MFC set to  0.000000
12/12/2010	3:18:28 PM	BCl3 MFC set to  0.000000
12/12/2010	3:18:28 PM	PHl3 MFC set to  0.000000
12/12/2010	3:18:28 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:18:28 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:18:28 PM	Tube furnace set to 0
12/12/2010	3:19:28 PM	Helium valve closed
12/12/2010	3:19:28 PM	H2 valve closed
12/12/2010	3:19:28 PM	BCl3 valve closed
12/12/2010	3:19:28 PM	PH3 valve closed
12/12/2010	3:19:28 PM	SiCl4 pre valve closed
12/12/2010	3:19:28 PM	SiCl4 post valve closed
12/12/2010	3:19:28 PM	Bubbler valve closed
12/12/2010	3:19:28 PM	Main Vac valve opened
12/12/2010	3:19:28 PM	Bypass valve opened
12/12/2010	3:19:28 PM	Helium MFC set to  0.000000
12/12/2010	3:19:28 PM	H2 MFC set to  0.000000
12/12/2010	3:19:28 PM	BCl3 MFC set to  0.000000
12/12/2010	3:19:28 PM	PHl3 MFC set to  0.000000
12/12/2010	3:19:28 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:19:28 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:19:28 PM	Tube furnace set to 0
12/12/2010	3:19:29 PM	Run finished at 3:19 PM
12/12/2010	3:19:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/12/2010	3:32:09 PM	Main Vac valve closed
12/12/2010	3:32:10 PM	Bypass valve closed
12/12/2010	3:32:28 PM	Bypass valve opened
12/12/2010	3:32:29 PM	Main Vac valve opened
12/12/2010	3:34:51 PM	Recipe started at 3:34 PM
12/12/2010	3:34:51 PM	Helium valve closed
12/12/2010	3:34:51 PM	BCl3 valve closed
12/12/2010	3:34:51 PM	PH3 valve closed
12/12/2010	3:34:51 PM	SiCl4 pre valve closed
12/12/2010	3:34:51 PM	SiCl4 post valve closed
12/12/2010	3:34:51 PM	Main Vac valve closed
12/12/2010	3:34:51 PM	Bypass valve closed
12/12/2010	3:34:51 PM	Bubbler valve closed
12/12/2010	3:34:51 PM	H2 valve opened
12/12/2010	3:34:51 PM	Helium MFC set to  0.000000
12/12/2010	3:34:51 PM	H2 MFC set to  500.000000
12/12/2010	3:34:51 PM	BCl3 MFC set to  0.000000
12/12/2010	3:34:51 PM	PHl3 MFC set to  0.000000
12/12/2010	3:34:51 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:34:51 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:34:51 PM	Tube furnace set to 0
12/12/2010	3:36:10 PM	Helium valve closed
12/12/2010	3:36:10 PM	BCl3 valve closed
12/12/2010	3:36:10 PM	PH3 valve closed
12/12/2010	3:36:10 PM	SiCl4 pre valve closed
12/12/2010	3:36:10 PM	SiCl4 post valve closed
12/12/2010	3:36:10 PM	Main Vac valve closed
12/12/2010	3:36:10 PM	Bypass valve closed
12/12/2010	3:36:10 PM	H2 valve opened
12/12/2010	3:36:10 PM	Bubbler valve opened
12/12/2010	3:36:10 PM	Helium MFC set to  0.000000
12/12/2010	3:36:10 PM	H2 MFC set to  500.000000
12/12/2010	3:36:10 PM	BCl3 MFC set to  0.000000
12/12/2010	3:36:10 PM	PHl3 MFC set to  0.000000
12/12/2010	3:36:10 PM	SiCl4 MFC set to  0.000000
12/12/2010	3:36:10 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:36:11 PM	Tube furnace set to 1050
12/12/2010	3:56:11 PM	Helium valve closed
12/12/2010	3:56:11 PM	BCl3 valve closed
12/12/2010	3:56:11 PM	PH3 valve closed
12/12/2010	3:56:11 PM	Main Vac valve closed
12/12/2010	3:56:11 PM	Bypass valve closed
12/12/2010	3:56:11 PM	H2 valve opened
12/12/2010	3:56:11 PM	SiCl4 pre valve opened
12/12/2010	3:56:11 PM	SiCl4 post valve opened
12/12/2010	3:56:11 PM	Bubbler valve opened
12/12/2010	3:56:11 PM	Helium MFC set to  0.000000
12/12/2010	3:56:11 PM	H2 MFC set to  500.000000
12/12/2010	3:56:11 PM	BCl3 MFC set to  0.000000
12/12/2010	3:56:11 PM	PHl3 MFC set to  0.000000
12/12/2010	3:56:11 PM	SiCl4 MFC set to  50.000000
12/12/2010	3:56:11 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	3:56:11 PM	Tube furnace set to 1050
12/12/2010	4:16:11 PM	H2 valve closed
12/12/2010	4:16:11 PM	BCl3 valve closed
12/12/2010	4:16:11 PM	PH3 valve closed
12/12/2010	4:16:11 PM	SiCl4 pre valve closed
12/12/2010	4:16:11 PM	SiCl4 post valve closed
12/12/2010	4:16:11 PM	Main Vac valve closed
12/12/2010	4:16:11 PM	Bypass valve closed
12/12/2010	4:16:11 PM	Helium valve opened
12/12/2010	4:16:11 PM	Bubbler valve opened
12/12/2010	4:16:11 PM	Helium MFC set to  500.000000
12/12/2010	4:16:11 PM	H2 MFC set to  0.000000
12/12/2010	4:16:11 PM	BCl3 MFC set to  0.000000
12/12/2010	4:16:11 PM	PHl3 MFC set to  0.000000
12/12/2010	4:16:11 PM	SiCl4 MFC set to  0.000000
12/12/2010	4:16:11 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	4:16:11 PM	Tube furnace set to 0
12/12/2010	4:36:11 PM	Helium valve closed
12/12/2010	4:36:11 PM	H2 valve closed
12/12/2010	4:36:11 PM	BCl3 valve closed
12/12/2010	4:36:11 PM	PH3 valve closed
12/12/2010	4:36:11 PM	SiCl4 pre valve closed
12/12/2010	4:36:11 PM	SiCl4 post valve closed
12/12/2010	4:36:11 PM	Main Vac valve closed
12/12/2010	4:36:11 PM	Bypass valve closed
12/12/2010	4:36:11 PM	Bubbler valve closed
12/12/2010	4:36:11 PM	Helium MFC set to  0.000000
12/12/2010	4:36:11 PM	H2 MFC set to  0.000000
12/12/2010	4:36:11 PM	BCl3 MFC set to  0.000000
12/12/2010	4:36:11 PM	PHl3 MFC set to  0.000000
12/12/2010	4:36:11 PM	SiCl4 MFC set to  0.000000
12/12/2010	4:36:11 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	4:36:11 PM	Tube furnace set to 0
12/12/2010	4:36:11 PM	Run finished at 4:36 PM
12/12/2010	4:54:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2010	4:54:02 PM	Recipe started at 4:54 PM
12/12/2010	4:54:02 PM	H2 valve closed
12/12/2010	4:54:02 PM	BCl3 valve closed
12/12/2010	4:54:02 PM	PH3 valve closed
12/12/2010	4:54:02 PM	SiCl4 pre valve closed
12/12/2010	4:54:02 PM	SiCl4 post valve closed
12/12/2010	4:54:02 PM	Main Vac valve closed
12/12/2010	4:54:02 PM	Bypass valve closed
12/12/2010	4:54:02 PM	Bubbler valve closed
12/12/2010	4:54:02 PM	Helium valve opened
12/12/2010	4:54:02 PM	Helium MFC set to  500.000000
12/12/2010	4:54:02 PM	H2 MFC set to  0.000000
12/12/2010	4:54:02 PM	BCl3 MFC set to  0.000000
12/12/2010	4:54:02 PM	PHl3 MFC set to  0.000000
12/12/2010	4:54:02 PM	SiCl4 MFC set to  0.000000
12/12/2010	4:54:02 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	4:54:02 PM	Tube furnace set to 0
12/12/2010	4:54:05 PM	Helium valve closed
12/12/2010	4:54:05 PM	H2 valve closed
12/12/2010	4:54:05 PM	BCl3 valve closed
12/12/2010	4:54:05 PM	PH3 valve closed
12/12/2010	4:54:05 PM	SiCl4 pre valve closed
12/12/2010	4:54:05 PM	SiCl4 post valve closed
12/12/2010	4:54:05 PM	Main Vac valve closed
12/12/2010	4:54:05 PM	Bypass valve closed
12/12/2010	4:54:05 PM	Bubbler valve closed
12/12/2010	4:54:05 PM	Helium MFC set to  0.000000
12/12/2010	4:54:05 PM	H2 MFC set to  0.000000
12/12/2010	4:54:05 PM	BCl3 MFC set to  0.000000
12/12/2010	4:54:05 PM	PHl3 MFC set to  0.000000
12/12/2010	4:54:05 PM	SiCl4 MFC set to  0.000000
12/12/2010	4:54:05 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	4:54:05 PM	Tube furnace set to 0
12/12/2010	4:54:05 PM	Run finished at 4:54 PM
12/12/2010	4:54:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2010	4:58:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2010	4:58:02 PM	Recipe started at 4:58 PM
12/12/2010	4:58:02 PM	Helium valve closed
12/12/2010	4:58:02 PM	H2 valve closed
12/12/2010	4:58:02 PM	BCl3 valve closed
12/12/2010	4:58:02 PM	PH3 valve closed
12/12/2010	4:58:02 PM	SiCl4 pre valve closed
12/12/2010	4:58:02 PM	SiCl4 post valve closed
12/12/2010	4:58:02 PM	Main Vac valve closed
12/12/2010	4:58:02 PM	Bubbler valve closed
12/12/2010	4:58:02 PM	Bypass valve opened
12/12/2010	4:58:02 PM	Helium MFC set to  0.000000
12/12/2010	4:58:02 PM	H2 MFC set to  0.000000
12/12/2010	4:58:02 PM	BCl3 MFC set to  0.000000
12/12/2010	4:58:02 PM	PHl3 MFC set to  0.000000
12/12/2010	4:58:02 PM	SiCl4 MFC set to  0.000000
12/12/2010	4:58:02 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	4:58:02 PM	Tube furnace set to 0
12/12/2010	4:58:58 PM	Helium valve closed
12/12/2010	4:58:58 PM	H2 valve closed
12/12/2010	4:58:58 PM	BCl3 valve closed
12/12/2010	4:58:58 PM	PH3 valve closed
12/12/2010	4:58:58 PM	SiCl4 pre valve closed
12/12/2010	4:58:58 PM	SiCl4 post valve closed
12/12/2010	4:58:58 PM	Bubbler valve closed
12/12/2010	4:58:58 PM	Main Vac valve opened
12/12/2010	4:58:58 PM	Bypass valve opened
12/12/2010	4:58:58 PM	Helium MFC set to  0.000000
12/12/2010	4:58:58 PM	H2 MFC set to  0.000000
12/12/2010	4:58:58 PM	BCl3 MFC set to  0.000000
12/12/2010	4:58:58 PM	PHl3 MFC set to  0.000000
12/12/2010	4:58:58 PM	SiCl4 MFC set to  0.000000
12/12/2010	4:58:58 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	4:58:58 PM	Tube furnace set to 0
12/12/2010	4:58:58 PM	Run finished at 4:58 PM
12/12/2010	4:58:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2010	4:59:45 PM	Main Vac valve closed
12/12/2010	4:59:46 PM	Bypass valve closed
12/12/2010	4:59:53 PM	Bypass valve opened
12/12/2010	4:59:53 PM	Main Vac valve opened
12/12/2010	5:01:27 PM	Bypass valve closed
12/12/2010	5:01:30 PM	Bypass valve opened
12/12/2010	5:01:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/12/2010	5:01:49 PM	Recipe started at 5:01 PM
12/12/2010	5:01:49 PM	Helium valve closed
12/12/2010	5:01:49 PM	H2 valve closed
12/12/2010	5:01:49 PM	BCl3 valve closed
12/12/2010	5:01:49 PM	PH3 valve closed
12/12/2010	5:01:49 PM	SiCl4 pre valve closed
12/12/2010	5:01:49 PM	SiCl4 post valve closed
12/12/2010	5:01:49 PM	Main Vac valve closed
12/12/2010	5:01:49 PM	Bubbler valve closed
12/12/2010	5:01:49 PM	Bypass valve opened
12/12/2010	5:01:49 PM	Helium MFC set to  0.000000
12/12/2010	5:01:49 PM	H2 MFC set to  0.000000
12/12/2010	5:01:49 PM	BCl3 MFC set to  0.000000
12/12/2010	5:01:49 PM	PHl3 MFC set to  0.000000
12/12/2010	5:01:49 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:01:49 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:01:49 PM	Tube furnace set to 0
12/12/2010	5:01:49 PM	Helium valve closed
12/12/2010	5:01:49 PM	H2 valve closed
12/12/2010	5:01:49 PM	BCl3 valve closed
12/12/2010	5:01:49 PM	PH3 valve closed
12/12/2010	5:01:49 PM	SiCl4 pre valve closed
12/12/2010	5:01:49 PM	SiCl4 post valve closed
12/12/2010	5:01:49 PM	Bubbler valve closed
12/12/2010	5:01:49 PM	Main Vac valve opened
12/12/2010	5:01:49 PM	Bypass valve opened
12/12/2010	5:01:49 PM	Helium MFC set to  0.000000
12/12/2010	5:01:49 PM	H2 MFC set to  0.000000
12/12/2010	5:01:49 PM	BCl3 MFC set to  0.000000
12/12/2010	5:01:49 PM	PHl3 MFC set to  0.000000
12/12/2010	5:01:49 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:01:49 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:01:49 PM	Tube furnace set to 0
12/12/2010	5:02:49 PM	H2 valve closed
12/12/2010	5:02:49 PM	BCl3 valve closed
12/12/2010	5:02:49 PM	PH3 valve closed
12/12/2010	5:02:49 PM	SiCl4 pre valve closed
12/12/2010	5:02:49 PM	SiCl4 post valve closed
12/12/2010	5:02:49 PM	Bubbler valve closed
12/12/2010	5:02:49 PM	Helium valve opened
12/12/2010	5:02:49 PM	Main Vac valve opened
12/12/2010	5:02:49 PM	Bypass valve opened
12/12/2010	5:02:49 PM	Helium MFC set to  100.000000
12/12/2010	5:02:49 PM	H2 MFC set to  0.000000
12/12/2010	5:02:49 PM	BCl3 MFC set to  0.000000
12/12/2010	5:02:49 PM	PHl3 MFC set to  0.000000
12/12/2010	5:02:49 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:02:49 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:02:49 PM	Tube furnace set to 0
12/12/2010	5:03:49 PM	Helium valve closed
12/12/2010	5:03:49 PM	H2 valve closed
12/12/2010	5:03:49 PM	BCl3 valve closed
12/12/2010	5:03:49 PM	PH3 valve closed
12/12/2010	5:03:49 PM	SiCl4 pre valve closed
12/12/2010	5:03:49 PM	SiCl4 post valve closed
12/12/2010	5:03:49 PM	Bubbler valve closed
12/12/2010	5:03:49 PM	Main Vac valve opened
12/12/2010	5:03:49 PM	Bypass valve opened
12/12/2010	5:03:49 PM	Helium MFC set to  0.000000
12/12/2010	5:03:49 PM	H2 MFC set to  0.000000
12/12/2010	5:03:49 PM	BCl3 MFC set to  0.000000
12/12/2010	5:03:49 PM	PHl3 MFC set to  0.000000
12/12/2010	5:03:49 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:03:49 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:03:50 PM	Tube furnace set to 0
12/12/2010	5:04:50 PM	H2 valve closed
12/12/2010	5:04:50 PM	BCl3 valve closed
12/12/2010	5:04:50 PM	PH3 valve closed
12/12/2010	5:04:50 PM	SiCl4 pre valve closed
12/12/2010	5:04:50 PM	SiCl4 post valve closed
12/12/2010	5:04:50 PM	Bubbler valve closed
12/12/2010	5:04:50 PM	Helium valve opened
12/12/2010	5:04:50 PM	Main Vac valve opened
12/12/2010	5:04:50 PM	Bypass valve opened
12/12/2010	5:04:50 PM	Helium MFC set to  100.000000
12/12/2010	5:04:50 PM	H2 MFC set to  0.000000
12/12/2010	5:04:50 PM	BCl3 MFC set to  0.000000
12/12/2010	5:04:50 PM	PHl3 MFC set to  0.000000
12/12/2010	5:04:50 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:04:50 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:04:50 PM	Tube furnace set to 0
12/12/2010	5:05:50 PM	Helium valve closed
12/12/2010	5:05:50 PM	H2 valve closed
12/12/2010	5:05:50 PM	BCl3 valve closed
12/12/2010	5:05:50 PM	PH3 valve closed
12/12/2010	5:05:50 PM	SiCl4 pre valve closed
12/12/2010	5:05:50 PM	SiCl4 post valve closed
12/12/2010	5:05:50 PM	Bubbler valve closed
12/12/2010	5:05:50 PM	Main Vac valve opened
12/12/2010	5:05:50 PM	Bypass valve opened
12/12/2010	5:05:50 PM	Helium MFC set to  0.000000
12/12/2010	5:05:50 PM	H2 MFC set to  0.000000
12/12/2010	5:05:50 PM	BCl3 MFC set to  0.000000
12/12/2010	5:05:50 PM	PHl3 MFC set to  0.000000
12/12/2010	5:05:50 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:05:50 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:05:50 PM	Tube furnace set to 0
12/12/2010	5:06:50 PM	H2 valve closed
12/12/2010	5:06:50 PM	BCl3 valve closed
12/12/2010	5:06:50 PM	PH3 valve closed
12/12/2010	5:06:50 PM	SiCl4 pre valve closed
12/12/2010	5:06:50 PM	SiCl4 post valve closed
12/12/2010	5:06:50 PM	Bubbler valve closed
12/12/2010	5:06:50 PM	Helium valve opened
12/12/2010	5:06:50 PM	Main Vac valve opened
12/12/2010	5:06:50 PM	Bypass valve opened
12/12/2010	5:06:50 PM	Helium MFC set to  100.000000
12/12/2010	5:06:50 PM	H2 MFC set to  0.000000
12/12/2010	5:06:50 PM	BCl3 MFC set to  0.000000
12/12/2010	5:06:50 PM	PHl3 MFC set to  0.000000
12/12/2010	5:06:50 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:06:50 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:06:50 PM	Tube furnace set to 0
12/12/2010	5:07:50 PM	Helium valve closed
12/12/2010	5:07:50 PM	H2 valve closed
12/12/2010	5:07:50 PM	BCl3 valve closed
12/12/2010	5:07:50 PM	PH3 valve closed
12/12/2010	5:07:50 PM	SiCl4 pre valve closed
12/12/2010	5:07:50 PM	SiCl4 post valve closed
12/12/2010	5:07:50 PM	Bubbler valve closed
12/12/2010	5:07:50 PM	Main Vac valve opened
12/12/2010	5:07:50 PM	Bypass valve opened
12/12/2010	5:07:50 PM	Helium MFC set to  0.000000
12/12/2010	5:07:50 PM	H2 MFC set to  0.000000
12/12/2010	5:07:50 PM	BCl3 MFC set to  0.000000
12/12/2010	5:07:50 PM	PHl3 MFC set to  0.000000
12/12/2010	5:07:50 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:07:50 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:07:50 PM	Tube furnace set to 0
12/12/2010	5:08:50 PM	H2 valve closed
12/12/2010	5:08:50 PM	BCl3 valve closed
12/12/2010	5:08:50 PM	PH3 valve closed
12/12/2010	5:08:50 PM	SiCl4 pre valve closed
12/12/2010	5:08:50 PM	SiCl4 post valve closed
12/12/2010	5:08:50 PM	Bubbler valve closed
12/12/2010	5:08:50 PM	Helium valve opened
12/12/2010	5:08:50 PM	Main Vac valve opened
12/12/2010	5:08:50 PM	Bypass valve opened
12/12/2010	5:08:50 PM	Helium MFC set to  100.000000
12/12/2010	5:08:50 PM	H2 MFC set to  0.000000
12/12/2010	5:08:50 PM	BCl3 MFC set to  0.000000
12/12/2010	5:08:50 PM	PHl3 MFC set to  0.000000
12/12/2010	5:08:50 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:08:50 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:08:51 PM	Tube furnace set to 0
12/12/2010	5:09:51 PM	Helium valve closed
12/12/2010	5:09:51 PM	H2 valve closed
12/12/2010	5:09:51 PM	BCl3 valve closed
12/12/2010	5:09:51 PM	PH3 valve closed
12/12/2010	5:09:51 PM	SiCl4 pre valve closed
12/12/2010	5:09:51 PM	SiCl4 post valve closed
12/12/2010	5:09:51 PM	Bubbler valve closed
12/12/2010	5:09:51 PM	Main Vac valve opened
12/12/2010	5:09:51 PM	Bypass valve opened
12/12/2010	5:09:51 PM	Helium MFC set to  0.000000
12/12/2010	5:09:51 PM	H2 MFC set to  0.000000
12/12/2010	5:09:51 PM	BCl3 MFC set to  0.000000
12/12/2010	5:09:51 PM	PHl3 MFC set to  0.000000
12/12/2010	5:09:51 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:09:51 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:09:51 PM	Tube furnace set to 0
12/12/2010	5:10:51 PM	H2 valve closed
12/12/2010	5:10:51 PM	BCl3 valve closed
12/12/2010	5:10:51 PM	PH3 valve closed
12/12/2010	5:10:51 PM	SiCl4 pre valve closed
12/12/2010	5:10:51 PM	SiCl4 post valve closed
12/12/2010	5:10:51 PM	Bubbler valve closed
12/12/2010	5:10:51 PM	Helium valve opened
12/12/2010	5:10:51 PM	Main Vac valve opened
12/12/2010	5:10:51 PM	Bypass valve opened
12/12/2010	5:10:51 PM	Helium MFC set to  100.000000
12/12/2010	5:10:51 PM	H2 MFC set to  0.000000
12/12/2010	5:10:51 PM	BCl3 MFC set to  0.000000
12/12/2010	5:10:51 PM	PHl3 MFC set to  0.000000
12/12/2010	5:10:51 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:10:51 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:10:51 PM	Tube furnace set to 0
12/12/2010	5:11:51 PM	Helium valve closed
12/12/2010	5:11:51 PM	H2 valve closed
12/12/2010	5:11:51 PM	BCl3 valve closed
12/12/2010	5:11:51 PM	PH3 valve closed
12/12/2010	5:11:51 PM	SiCl4 pre valve closed
12/12/2010	5:11:51 PM	SiCl4 post valve closed
12/12/2010	5:11:51 PM	Bubbler valve closed
12/12/2010	5:11:51 PM	Main Vac valve opened
12/12/2010	5:11:51 PM	Bypass valve opened
12/12/2010	5:11:51 PM	Helium MFC set to  0.000000
12/12/2010	5:11:51 PM	H2 MFC set to  0.000000
12/12/2010	5:11:51 PM	BCl3 MFC set to  0.000000
12/12/2010	5:11:51 PM	PHl3 MFC set to  0.000000
12/12/2010	5:11:51 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:11:51 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:11:51 PM	Tube furnace set to 0
12/12/2010	5:12:51 PM	H2 valve closed
12/12/2010	5:12:51 PM	BCl3 valve closed
12/12/2010	5:12:51 PM	PH3 valve closed
12/12/2010	5:12:51 PM	SiCl4 pre valve closed
12/12/2010	5:12:51 PM	SiCl4 post valve closed
12/12/2010	5:12:51 PM	Bubbler valve closed
12/12/2010	5:12:51 PM	Helium valve opened
12/12/2010	5:12:51 PM	Main Vac valve opened
12/12/2010	5:12:51 PM	Bypass valve opened
12/12/2010	5:12:51 PM	Helium MFC set to  100.000000
12/12/2010	5:12:51 PM	H2 MFC set to  0.000000
12/12/2010	5:12:51 PM	BCl3 MFC set to  0.000000
12/12/2010	5:12:51 PM	PHl3 MFC set to  0.000000
12/12/2010	5:12:51 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:12:51 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:12:51 PM	Tube furnace set to 0
12/12/2010	5:13:51 PM	Helium valve closed
12/12/2010	5:13:51 PM	H2 valve closed
12/12/2010	5:13:51 PM	BCl3 valve closed
12/12/2010	5:13:51 PM	PH3 valve closed
12/12/2010	5:13:51 PM	SiCl4 pre valve closed
12/12/2010	5:13:51 PM	SiCl4 post valve closed
12/12/2010	5:13:51 PM	Bubbler valve closed
12/12/2010	5:13:51 PM	Main Vac valve opened
12/12/2010	5:13:51 PM	Bypass valve opened
12/12/2010	5:13:51 PM	Helium MFC set to  0.000000
12/12/2010	5:13:51 PM	H2 MFC set to  0.000000
12/12/2010	5:13:51 PM	BCl3 MFC set to  0.000000
12/12/2010	5:13:51 PM	PHl3 MFC set to  0.000000
12/12/2010	5:13:51 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:13:51 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:13:52 PM	Tube furnace set to 0
12/12/2010	5:14:52 PM	H2 valve closed
12/12/2010	5:14:52 PM	BCl3 valve closed
12/12/2010	5:14:52 PM	PH3 valve closed
12/12/2010	5:14:52 PM	SiCl4 pre valve closed
12/12/2010	5:14:52 PM	SiCl4 post valve closed
12/12/2010	5:14:52 PM	Bubbler valve closed
12/12/2010	5:14:52 PM	Helium valve opened
12/12/2010	5:14:52 PM	Main Vac valve opened
12/12/2010	5:14:52 PM	Bypass valve opened
12/12/2010	5:14:52 PM	Helium MFC set to  100.000000
12/12/2010	5:14:52 PM	H2 MFC set to  0.000000
12/12/2010	5:14:52 PM	BCl3 MFC set to  0.000000
12/12/2010	5:14:52 PM	PHl3 MFC set to  0.000000
12/12/2010	5:14:52 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:14:52 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:14:52 PM	Tube furnace set to 0
12/12/2010	5:15:52 PM	Helium valve closed
12/12/2010	5:15:52 PM	H2 valve closed
12/12/2010	5:15:52 PM	BCl3 valve closed
12/12/2010	5:15:52 PM	PH3 valve closed
12/12/2010	5:15:52 PM	SiCl4 pre valve closed
12/12/2010	5:15:52 PM	SiCl4 post valve closed
12/12/2010	5:15:52 PM	Bubbler valve closed
12/12/2010	5:15:52 PM	Main Vac valve opened
12/12/2010	5:15:52 PM	Bypass valve opened
12/12/2010	5:15:52 PM	Helium MFC set to  0.000000
12/12/2010	5:15:52 PM	H2 MFC set to  0.000000
12/12/2010	5:15:52 PM	BCl3 MFC set to  0.000000
12/12/2010	5:15:52 PM	PHl3 MFC set to  0.000000
12/12/2010	5:15:52 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:15:52 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:15:52 PM	Tube furnace set to 0
12/12/2010	5:16:52 PM	H2 valve closed
12/12/2010	5:16:52 PM	BCl3 valve closed
12/12/2010	5:16:52 PM	PH3 valve closed
12/12/2010	5:16:52 PM	SiCl4 pre valve closed
12/12/2010	5:16:52 PM	SiCl4 post valve closed
12/12/2010	5:16:52 PM	Bubbler valve closed
12/12/2010	5:16:52 PM	Helium valve opened
12/12/2010	5:16:52 PM	Main Vac valve opened
12/12/2010	5:16:52 PM	Bypass valve opened
12/12/2010	5:16:52 PM	Helium MFC set to  100.000000
12/12/2010	5:16:52 PM	H2 MFC set to  0.000000
12/12/2010	5:16:52 PM	BCl3 MFC set to  0.000000
12/12/2010	5:16:52 PM	PHl3 MFC set to  0.000000
12/12/2010	5:16:52 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:16:52 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:16:52 PM	Tube furnace set to 0
12/12/2010	5:17:52 PM	Helium valve closed
12/12/2010	5:17:52 PM	H2 valve closed
12/12/2010	5:17:52 PM	BCl3 valve closed
12/12/2010	5:17:52 PM	PH3 valve closed
12/12/2010	5:17:52 PM	SiCl4 pre valve closed
12/12/2010	5:17:52 PM	SiCl4 post valve closed
12/12/2010	5:17:52 PM	Bubbler valve closed
12/12/2010	5:17:52 PM	Main Vac valve opened
12/12/2010	5:17:52 PM	Bypass valve opened
12/12/2010	5:17:52 PM	Helium MFC set to  0.000000
12/12/2010	5:17:52 PM	H2 MFC set to  0.000000
12/12/2010	5:17:52 PM	BCl3 MFC set to  0.000000
12/12/2010	5:17:52 PM	PHl3 MFC set to  0.000000
12/12/2010	5:17:52 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:17:52 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:17:52 PM	Tube furnace set to 0
12/12/2010	5:18:52 PM	H2 valve closed
12/12/2010	5:18:52 PM	BCl3 valve closed
12/12/2010	5:18:52 PM	PH3 valve closed
12/12/2010	5:18:52 PM	SiCl4 pre valve closed
12/12/2010	5:18:52 PM	SiCl4 post valve closed
12/12/2010	5:18:52 PM	Bubbler valve closed
12/12/2010	5:18:52 PM	Helium valve opened
12/12/2010	5:18:52 PM	Main Vac valve opened
12/12/2010	5:18:52 PM	Bypass valve opened
12/12/2010	5:18:52 PM	Helium MFC set to  100.000000
12/12/2010	5:18:52 PM	H2 MFC set to  0.000000
12/12/2010	5:18:52 PM	BCl3 MFC set to  0.000000
12/12/2010	5:18:52 PM	PHl3 MFC set to  0.000000
12/12/2010	5:18:52 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:18:52 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:18:53 PM	Tube furnace set to 0
12/12/2010	5:19:53 PM	Helium valve closed
12/12/2010	5:19:53 PM	H2 valve closed
12/12/2010	5:19:53 PM	BCl3 valve closed
12/12/2010	5:19:53 PM	PH3 valve closed
12/12/2010	5:19:53 PM	SiCl4 pre valve closed
12/12/2010	5:19:53 PM	SiCl4 post valve closed
12/12/2010	5:19:53 PM	Bubbler valve closed
12/12/2010	5:19:53 PM	Main Vac valve opened
12/12/2010	5:19:53 PM	Bypass valve opened
12/12/2010	5:19:53 PM	Helium MFC set to  0.000000
12/12/2010	5:19:53 PM	H2 MFC set to  0.000000
12/12/2010	5:19:53 PM	BCl3 MFC set to  0.000000
12/12/2010	5:19:53 PM	PHl3 MFC set to  0.000000
12/12/2010	5:19:53 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:19:53 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:19:53 PM	Tube furnace set to 0
12/12/2010	5:20:53 PM	H2 valve closed
12/12/2010	5:20:53 PM	BCl3 valve closed
12/12/2010	5:20:53 PM	PH3 valve closed
12/12/2010	5:20:53 PM	SiCl4 pre valve closed
12/12/2010	5:20:53 PM	SiCl4 post valve closed
12/12/2010	5:20:53 PM	Bubbler valve closed
12/12/2010	5:20:53 PM	Helium valve opened
12/12/2010	5:20:53 PM	Main Vac valve opened
12/12/2010	5:20:53 PM	Bypass valve opened
12/12/2010	5:20:53 PM	Helium MFC set to  100.000000
12/12/2010	5:20:53 PM	H2 MFC set to  0.000000
12/12/2010	5:20:53 PM	BCl3 MFC set to  0.000000
12/12/2010	5:20:53 PM	PHl3 MFC set to  0.000000
12/12/2010	5:20:53 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:20:53 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:20:53 PM	Tube furnace set to 0
12/12/2010	5:21:53 PM	Helium valve closed
12/12/2010	5:21:53 PM	H2 valve closed
12/12/2010	5:21:53 PM	BCl3 valve closed
12/12/2010	5:21:53 PM	PH3 valve closed
12/12/2010	5:21:53 PM	SiCl4 pre valve closed
12/12/2010	5:21:53 PM	SiCl4 post valve closed
12/12/2010	5:21:53 PM	Bubbler valve closed
12/12/2010	5:21:53 PM	Main Vac valve opened
12/12/2010	5:21:53 PM	Bypass valve opened
12/12/2010	5:21:53 PM	Helium MFC set to  0.000000
12/12/2010	5:21:53 PM	H2 MFC set to  0.000000
12/12/2010	5:21:53 PM	BCl3 MFC set to  0.000000
12/12/2010	5:21:53 PM	PHl3 MFC set to  0.000000
12/12/2010	5:21:53 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:21:53 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:21:53 PM	Tube furnace set to 0
12/12/2010	5:21:54 PM	Run finished at 5:21 PM
12/12/2010	5:21:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/12/2010	5:25:48 PM	Bypass valve closed
12/12/2010	5:25:48 PM	Main Vac valve closed
12/12/2010	5:25:51 PM	Main Vac valve opened
12/12/2010	5:25:53 PM	Bypass valve opened
12/12/2010	5:26:45 PM	Recipe started at 5:26 PM
12/12/2010	5:26:45 PM	Helium valve closed
12/12/2010	5:26:45 PM	BCl3 valve closed
12/12/2010	5:26:45 PM	PH3 valve closed
12/12/2010	5:26:45 PM	SiCl4 pre valve closed
12/12/2010	5:26:45 PM	SiCl4 post valve closed
12/12/2010	5:26:45 PM	Main Vac valve closed
12/12/2010	5:26:45 PM	Bypass valve closed
12/12/2010	5:26:45 PM	Bubbler valve closed
12/12/2010	5:26:45 PM	H2 valve opened
12/12/2010	5:26:45 PM	Helium MFC set to  0.000000
12/12/2010	5:26:45 PM	H2 MFC set to  500.000000
12/12/2010	5:26:45 PM	BCl3 MFC set to  0.000000
12/12/2010	5:26:45 PM	PHl3 MFC set to  0.000000
12/12/2010	5:26:45 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:26:45 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:26:45 PM	Tube furnace set to 0
12/12/2010	5:28:04 PM	Helium valve closed
12/12/2010	5:28:04 PM	BCl3 valve closed
12/12/2010	5:28:04 PM	PH3 valve closed
12/12/2010	5:28:04 PM	SiCl4 pre valve closed
12/12/2010	5:28:04 PM	SiCl4 post valve closed
12/12/2010	5:28:04 PM	Main Vac valve closed
12/12/2010	5:28:04 PM	Bypass valve closed
12/12/2010	5:28:04 PM	H2 valve opened
12/12/2010	5:28:04 PM	Bubbler valve opened
12/12/2010	5:28:04 PM	Helium MFC set to  0.000000
12/12/2010	5:28:04 PM	H2 MFC set to  500.000000
12/12/2010	5:28:04 PM	BCl3 MFC set to  0.000000
12/12/2010	5:28:04 PM	PHl3 MFC set to  0.000000
12/12/2010	5:28:04 PM	SiCl4 MFC set to  0.000000
12/12/2010	5:28:04 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:28:04 PM	Tube furnace set to 1050
12/12/2010	5:48:04 PM	Helium valve closed
12/12/2010	5:48:04 PM	BCl3 valve closed
12/12/2010	5:48:04 PM	PH3 valve closed
12/12/2010	5:48:04 PM	Main Vac valve closed
12/12/2010	5:48:04 PM	Bypass valve closed
12/12/2010	5:48:04 PM	H2 valve opened
12/12/2010	5:48:04 PM	SiCl4 pre valve opened
12/12/2010	5:48:04 PM	SiCl4 post valve opened
12/12/2010	5:48:04 PM	Bubbler valve opened
12/12/2010	5:48:04 PM	Helium MFC set to  0.000000
12/12/2010	5:48:04 PM	H2 MFC set to  500.000000
12/12/2010	5:48:04 PM	BCl3 MFC set to  0.000000
12/12/2010	5:48:04 PM	PHl3 MFC set to  0.000000
12/12/2010	5:48:04 PM	SiCl4 MFC set to  50.000000
12/12/2010	5:48:04 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	5:48:04 PM	Tube furnace set to 1050
12/12/2010	6:08:04 PM	H2 valve closed
12/12/2010	6:08:04 PM	BCl3 valve closed
12/12/2010	6:08:04 PM	PH3 valve closed
12/12/2010	6:08:04 PM	SiCl4 pre valve closed
12/12/2010	6:08:04 PM	SiCl4 post valve closed
12/12/2010	6:08:04 PM	Main Vac valve closed
12/12/2010	6:08:04 PM	Bypass valve closed
12/12/2010	6:08:04 PM	Helium valve opened
12/12/2010	6:08:04 PM	Bubbler valve opened
12/12/2010	6:08:04 PM	Helium MFC set to  500.000000
12/12/2010	6:08:04 PM	H2 MFC set to  0.000000
12/12/2010	6:08:04 PM	BCl3 MFC set to  0.000000
12/12/2010	6:08:04 PM	PHl3 MFC set to  0.000000
12/12/2010	6:08:04 PM	SiCl4 MFC set to  0.000000
12/12/2010	6:08:04 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	6:08:05 PM	Tube furnace set to 0
12/12/2010	6:28:05 PM	Helium valve closed
12/12/2010	6:28:05 PM	H2 valve closed
12/12/2010	6:28:05 PM	BCl3 valve closed
12/12/2010	6:28:05 PM	PH3 valve closed
12/12/2010	6:28:05 PM	SiCl4 pre valve closed
12/12/2010	6:28:05 PM	SiCl4 post valve closed
12/12/2010	6:28:05 PM	Main Vac valve closed
12/12/2010	6:28:05 PM	Bypass valve closed
12/12/2010	6:28:05 PM	Bubbler valve closed
12/12/2010	6:28:05 PM	Helium MFC set to  0.000000
12/12/2010	6:28:05 PM	H2 MFC set to  0.000000
12/12/2010	6:28:05 PM	BCl3 MFC set to  0.000000
12/12/2010	6:28:05 PM	PHl3 MFC set to  0.000000
12/12/2010	6:28:05 PM	SiCl4 MFC set to  0.000000
12/12/2010	6:28:05 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	6:28:05 PM	Tube furnace set to 0
12/12/2010	6:28:05 PM	Run finished at 6:28 PM
12/12/2010	6:42:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2010	6:42:38 PM	Recipe started at 6:42 PM
12/12/2010	6:42:38 PM	H2 valve closed
12/12/2010	6:42:38 PM	BCl3 valve closed
12/12/2010	6:42:38 PM	PH3 valve closed
12/12/2010	6:42:38 PM	SiCl4 pre valve closed
12/12/2010	6:42:38 PM	SiCl4 post valve closed
12/12/2010	6:42:38 PM	Main Vac valve closed
12/12/2010	6:42:38 PM	Bypass valve closed
12/12/2010	6:42:38 PM	Bubbler valve closed
12/12/2010	6:42:38 PM	Helium valve opened
12/12/2010	6:42:38 PM	Helium MFC set to  500.000000
12/12/2010	6:42:38 PM	H2 MFC set to  0.000000
12/12/2010	6:42:38 PM	BCl3 MFC set to  0.000000
12/12/2010	6:42:38 PM	PHl3 MFC set to  0.000000
12/12/2010	6:42:38 PM	SiCl4 MFC set to  0.000000
12/12/2010	6:42:38 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	6:42:39 PM	Tube furnace set to 0
12/12/2010	6:42:43 PM	Helium valve closed
12/12/2010	6:42:43 PM	H2 valve closed
12/12/2010	6:42:43 PM	BCl3 valve closed
12/12/2010	6:42:43 PM	PH3 valve closed
12/12/2010	6:42:43 PM	SiCl4 pre valve closed
12/12/2010	6:42:43 PM	SiCl4 post valve closed
12/12/2010	6:42:43 PM	Main Vac valve closed
12/12/2010	6:42:43 PM	Bypass valve closed
12/12/2010	6:42:43 PM	Bubbler valve closed
12/12/2010	6:42:43 PM	Helium MFC set to  0.000000
12/12/2010	6:42:43 PM	H2 MFC set to  0.000000
12/12/2010	6:42:43 PM	BCl3 MFC set to  0.000000
12/12/2010	6:42:43 PM	PHl3 MFC set to  0.000000
12/12/2010	6:42:43 PM	SiCl4 MFC set to  0.000000
12/12/2010	6:42:43 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	6:42:44 PM	Tube furnace set to 0
12/12/2010	6:42:44 PM	Run finished at 6:42 PM
12/12/2010	6:42:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2010	6:47:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2010	6:47:20 PM	Recipe started at 6:47 PM
12/12/2010	6:47:20 PM	Helium valve closed
12/12/2010	6:47:20 PM	H2 valve closed
12/12/2010	6:47:20 PM	BCl3 valve closed
12/12/2010	6:47:20 PM	PH3 valve closed
12/12/2010	6:47:20 PM	SiCl4 pre valve closed
12/12/2010	6:47:20 PM	SiCl4 post valve closed
12/12/2010	6:47:20 PM	Main Vac valve closed
12/12/2010	6:47:20 PM	Bubbler valve closed
12/12/2010	6:47:20 PM	Bypass valve opened
12/12/2010	6:47:20 PM	Helium MFC set to  0.000000
12/12/2010	6:47:20 PM	H2 MFC set to  0.000000
12/12/2010	6:47:20 PM	BCl3 MFC set to  0.000000
12/12/2010	6:47:20 PM	PHl3 MFC set to  0.000000
12/12/2010	6:47:20 PM	SiCl4 MFC set to  0.000000
12/12/2010	6:47:20 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	6:47:20 PM	Tube furnace set to 0
12/12/2010	6:48:16 PM	Helium valve closed
12/12/2010	6:48:16 PM	H2 valve closed
12/12/2010	6:48:16 PM	BCl3 valve closed
12/12/2010	6:48:16 PM	PH3 valve closed
12/12/2010	6:48:16 PM	SiCl4 pre valve closed
12/12/2010	6:48:16 PM	SiCl4 post valve closed
12/12/2010	6:48:16 PM	Bubbler valve closed
12/12/2010	6:48:16 PM	Main Vac valve opened
12/12/2010	6:48:16 PM	Bypass valve opened
12/12/2010	6:48:16 PM	Helium MFC set to  0.000000
12/12/2010	6:48:16 PM	H2 MFC set to  0.000000
12/12/2010	6:48:16 PM	BCl3 MFC set to  0.000000
12/12/2010	6:48:16 PM	PHl3 MFC set to  0.000000
12/12/2010	6:48:16 PM	SiCl4 MFC set to  0.000000
12/12/2010	6:48:16 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	6:48:16 PM	Tube furnace set to 0
12/12/2010	6:48:16 PM	Run finished at 6:48 PM
12/12/2010	6:48:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2010	6:48:48 PM	Main Vac valve closed
12/12/2010	6:48:50 PM	Bypass valve closed
12/12/2010	6:48:58 PM	Bypass valve opened
12/12/2010	6:48:58 PM	Main Vac valve opened
12/12/2010	6:49:32 PM	Bypass valve closed
12/12/2010	6:49:34 PM	Main Vac valve closed
12/12/2010	6:49:42 PM	Main Vac valve opened
12/12/2010	6:49:43 PM	Bypass valve opened
12/12/2010	7:15:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/12/2010	7:16:05 PM	Recipe started at 7:15 PM
12/12/2010	7:16:05 PM	Helium valve closed
12/12/2010	7:16:05 PM	H2 valve closed
12/12/2010	7:16:05 PM	BCl3 valve closed
12/12/2010	7:16:05 PM	PH3 valve closed
12/12/2010	7:16:05 PM	SiCl4 pre valve closed
12/12/2010	7:16:05 PM	SiCl4 post valve closed
12/12/2010	7:16:05 PM	Main Vac valve closed
12/12/2010	7:16:05 PM	Bubbler valve closed
12/12/2010	7:16:05 PM	Bypass valve opened
12/12/2010	7:16:05 PM	Helium MFC set to  0.000000
12/12/2010	7:16:05 PM	H2 MFC set to  0.000000
12/12/2010	7:16:05 PM	BCl3 MFC set to  0.000000
12/12/2010	7:16:05 PM	PHl3 MFC set to  0.000000
12/12/2010	7:16:05 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:16:05 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:16:05 PM	Tube furnace set to 0
12/12/2010	7:16:06 PM	Helium valve closed
12/12/2010	7:16:06 PM	H2 valve closed
12/12/2010	7:16:06 PM	BCl3 valve closed
12/12/2010	7:16:06 PM	PH3 valve closed
12/12/2010	7:16:06 PM	SiCl4 pre valve closed
12/12/2010	7:16:06 PM	SiCl4 post valve closed
12/12/2010	7:16:06 PM	Bubbler valve closed
12/12/2010	7:16:06 PM	Main Vac valve opened
12/12/2010	7:16:06 PM	Bypass valve opened
12/12/2010	7:16:06 PM	Helium MFC set to  0.000000
12/12/2010	7:16:06 PM	H2 MFC set to  0.000000
12/12/2010	7:16:06 PM	BCl3 MFC set to  0.000000
12/12/2010	7:16:06 PM	PHl3 MFC set to  0.000000
12/12/2010	7:16:06 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:16:06 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:16:06 PM	Tube furnace set to 0
12/12/2010	7:17:06 PM	H2 valve closed
12/12/2010	7:17:06 PM	BCl3 valve closed
12/12/2010	7:17:06 PM	PH3 valve closed
12/12/2010	7:17:06 PM	SiCl4 pre valve closed
12/12/2010	7:17:06 PM	SiCl4 post valve closed
12/12/2010	7:17:06 PM	Bubbler valve closed
12/12/2010	7:17:06 PM	Helium valve opened
12/12/2010	7:17:06 PM	Main Vac valve opened
12/12/2010	7:17:06 PM	Bypass valve opened
12/12/2010	7:17:06 PM	Helium MFC set to  100.000000
12/12/2010	7:17:06 PM	H2 MFC set to  0.000000
12/12/2010	7:17:06 PM	BCl3 MFC set to  0.000000
12/12/2010	7:17:06 PM	PHl3 MFC set to  0.000000
12/12/2010	7:17:06 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:17:06 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:17:06 PM	Tube furnace set to 0
12/12/2010	7:18:06 PM	Helium valve closed
12/12/2010	7:18:06 PM	H2 valve closed
12/12/2010	7:18:06 PM	BCl3 valve closed
12/12/2010	7:18:06 PM	PH3 valve closed
12/12/2010	7:18:06 PM	SiCl4 pre valve closed
12/12/2010	7:18:06 PM	SiCl4 post valve closed
12/12/2010	7:18:06 PM	Bubbler valve closed
12/12/2010	7:18:06 PM	Main Vac valve opened
12/12/2010	7:18:06 PM	Bypass valve opened
12/12/2010	7:18:06 PM	Helium MFC set to  0.000000
12/12/2010	7:18:06 PM	H2 MFC set to  0.000000
12/12/2010	7:18:06 PM	BCl3 MFC set to  0.000000
12/12/2010	7:18:06 PM	PHl3 MFC set to  0.000000
12/12/2010	7:18:06 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:18:06 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:18:06 PM	Tube furnace set to 0
12/12/2010	7:19:06 PM	H2 valve closed
12/12/2010	7:19:06 PM	BCl3 valve closed
12/12/2010	7:19:06 PM	PH3 valve closed
12/12/2010	7:19:06 PM	SiCl4 pre valve closed
12/12/2010	7:19:06 PM	SiCl4 post valve closed
12/12/2010	7:19:06 PM	Bubbler valve closed
12/12/2010	7:19:06 PM	Helium valve opened
12/12/2010	7:19:06 PM	Main Vac valve opened
12/12/2010	7:19:06 PM	Bypass valve opened
12/12/2010	7:19:06 PM	Helium MFC set to  100.000000
12/12/2010	7:19:06 PM	H2 MFC set to  0.000000
12/12/2010	7:19:06 PM	BCl3 MFC set to  0.000000
12/12/2010	7:19:06 PM	PHl3 MFC set to  0.000000
12/12/2010	7:19:06 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:19:06 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:19:06 PM	Tube furnace set to 0
12/12/2010	7:20:06 PM	Helium valve closed
12/12/2010	7:20:06 PM	H2 valve closed
12/12/2010	7:20:06 PM	BCl3 valve closed
12/12/2010	7:20:06 PM	PH3 valve closed
12/12/2010	7:20:06 PM	SiCl4 pre valve closed
12/12/2010	7:20:06 PM	SiCl4 post valve closed
12/12/2010	7:20:06 PM	Bubbler valve closed
12/12/2010	7:20:06 PM	Main Vac valve opened
12/12/2010	7:20:06 PM	Bypass valve opened
12/12/2010	7:20:06 PM	Helium MFC set to  0.000000
12/12/2010	7:20:06 PM	H2 MFC set to  0.000000
12/12/2010	7:20:06 PM	BCl3 MFC set to  0.000000
12/12/2010	7:20:06 PM	PHl3 MFC set to  0.000000
12/12/2010	7:20:06 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:20:06 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:20:07 PM	Tube furnace set to 0
12/12/2010	7:21:07 PM	H2 valve closed
12/12/2010	7:21:07 PM	BCl3 valve closed
12/12/2010	7:21:07 PM	PH3 valve closed
12/12/2010	7:21:07 PM	SiCl4 pre valve closed
12/12/2010	7:21:07 PM	SiCl4 post valve closed
12/12/2010	7:21:07 PM	Bubbler valve closed
12/12/2010	7:21:07 PM	Helium valve opened
12/12/2010	7:21:07 PM	Main Vac valve opened
12/12/2010	7:21:07 PM	Bypass valve opened
12/12/2010	7:21:07 PM	Helium MFC set to  100.000000
12/12/2010	7:21:07 PM	H2 MFC set to  0.000000
12/12/2010	7:21:07 PM	BCl3 MFC set to  0.000000
12/12/2010	7:21:07 PM	PHl3 MFC set to  0.000000
12/12/2010	7:21:07 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:21:07 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:21:07 PM	Tube furnace set to 0
12/12/2010	7:22:07 PM	Helium valve closed
12/12/2010	7:22:07 PM	H2 valve closed
12/12/2010	7:22:07 PM	BCl3 valve closed
12/12/2010	7:22:07 PM	PH3 valve closed
12/12/2010	7:22:07 PM	SiCl4 pre valve closed
12/12/2010	7:22:07 PM	SiCl4 post valve closed
12/12/2010	7:22:07 PM	Bubbler valve closed
12/12/2010	7:22:07 PM	Main Vac valve opened
12/12/2010	7:22:07 PM	Bypass valve opened
12/12/2010	7:22:07 PM	Helium MFC set to  0.000000
12/12/2010	7:22:07 PM	H2 MFC set to  0.000000
12/12/2010	7:22:07 PM	BCl3 MFC set to  0.000000
12/12/2010	7:22:07 PM	PHl3 MFC set to  0.000000
12/12/2010	7:22:07 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:22:07 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:22:07 PM	Tube furnace set to 0
12/12/2010	7:23:07 PM	H2 valve closed
12/12/2010	7:23:07 PM	BCl3 valve closed
12/12/2010	7:23:07 PM	PH3 valve closed
12/12/2010	7:23:07 PM	SiCl4 pre valve closed
12/12/2010	7:23:07 PM	SiCl4 post valve closed
12/12/2010	7:23:07 PM	Bubbler valve closed
12/12/2010	7:23:07 PM	Helium valve opened
12/12/2010	7:23:07 PM	Main Vac valve opened
12/12/2010	7:23:07 PM	Bypass valve opened
12/12/2010	7:23:07 PM	Helium MFC set to  100.000000
12/12/2010	7:23:07 PM	H2 MFC set to  0.000000
12/12/2010	7:23:07 PM	BCl3 MFC set to  0.000000
12/12/2010	7:23:07 PM	PHl3 MFC set to  0.000000
12/12/2010	7:23:07 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:23:07 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:23:07 PM	Tube furnace set to 0
12/12/2010	7:24:07 PM	Helium valve closed
12/12/2010	7:24:07 PM	H2 valve closed
12/12/2010	7:24:07 PM	BCl3 valve closed
12/12/2010	7:24:07 PM	PH3 valve closed
12/12/2010	7:24:07 PM	SiCl4 pre valve closed
12/12/2010	7:24:07 PM	SiCl4 post valve closed
12/12/2010	7:24:07 PM	Bubbler valve closed
12/12/2010	7:24:07 PM	Main Vac valve opened
12/12/2010	7:24:07 PM	Bypass valve opened
12/12/2010	7:24:07 PM	Helium MFC set to  0.000000
12/12/2010	7:24:07 PM	H2 MFC set to  0.000000
12/12/2010	7:24:07 PM	BCl3 MFC set to  0.000000
12/12/2010	7:24:07 PM	PHl3 MFC set to  0.000000
12/12/2010	7:24:07 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:24:07 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:24:07 PM	Tube furnace set to 0
12/12/2010	7:25:07 PM	H2 valve closed
12/12/2010	7:25:07 PM	BCl3 valve closed
12/12/2010	7:25:07 PM	PH3 valve closed
12/12/2010	7:25:07 PM	SiCl4 pre valve closed
12/12/2010	7:25:07 PM	SiCl4 post valve closed
12/12/2010	7:25:07 PM	Bubbler valve closed
12/12/2010	7:25:07 PM	Helium valve opened
12/12/2010	7:25:07 PM	Main Vac valve opened
12/12/2010	7:25:07 PM	Bypass valve opened
12/12/2010	7:25:07 PM	Helium MFC set to  100.000000
12/12/2010	7:25:07 PM	H2 MFC set to  0.000000
12/12/2010	7:25:07 PM	BCl3 MFC set to  0.000000
12/12/2010	7:25:07 PM	PHl3 MFC set to  0.000000
12/12/2010	7:25:07 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:25:07 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:25:08 PM	Tube furnace set to 0
12/12/2010	7:26:08 PM	Helium valve closed
12/12/2010	7:26:08 PM	H2 valve closed
12/12/2010	7:26:08 PM	BCl3 valve closed
12/12/2010	7:26:08 PM	PH3 valve closed
12/12/2010	7:26:08 PM	SiCl4 pre valve closed
12/12/2010	7:26:08 PM	SiCl4 post valve closed
12/12/2010	7:26:08 PM	Bubbler valve closed
12/12/2010	7:26:08 PM	Main Vac valve opened
12/12/2010	7:26:08 PM	Bypass valve opened
12/12/2010	7:26:08 PM	Helium MFC set to  0.000000
12/12/2010	7:26:08 PM	H2 MFC set to  0.000000
12/12/2010	7:26:08 PM	BCl3 MFC set to  0.000000
12/12/2010	7:26:08 PM	PHl3 MFC set to  0.000000
12/12/2010	7:26:08 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:26:08 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:26:08 PM	Tube furnace set to 0
12/12/2010	7:27:08 PM	H2 valve closed
12/12/2010	7:27:08 PM	BCl3 valve closed
12/12/2010	7:27:08 PM	PH3 valve closed
12/12/2010	7:27:08 PM	SiCl4 pre valve closed
12/12/2010	7:27:08 PM	SiCl4 post valve closed
12/12/2010	7:27:08 PM	Bubbler valve closed
12/12/2010	7:27:08 PM	Helium valve opened
12/12/2010	7:27:08 PM	Main Vac valve opened
12/12/2010	7:27:08 PM	Bypass valve opened
12/12/2010	7:27:08 PM	Helium MFC set to  100.000000
12/12/2010	7:27:08 PM	H2 MFC set to  0.000000
12/12/2010	7:27:08 PM	BCl3 MFC set to  0.000000
12/12/2010	7:27:08 PM	PHl3 MFC set to  0.000000
12/12/2010	7:27:08 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:27:08 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:27:08 PM	Tube furnace set to 0
12/12/2010	7:28:08 PM	Helium valve closed
12/12/2010	7:28:08 PM	H2 valve closed
12/12/2010	7:28:08 PM	BCl3 valve closed
12/12/2010	7:28:08 PM	PH3 valve closed
12/12/2010	7:28:08 PM	SiCl4 pre valve closed
12/12/2010	7:28:08 PM	SiCl4 post valve closed
12/12/2010	7:28:08 PM	Bubbler valve closed
12/12/2010	7:28:08 PM	Main Vac valve opened
12/12/2010	7:28:08 PM	Bypass valve opened
12/12/2010	7:28:08 PM	Helium MFC set to  0.000000
12/12/2010	7:28:08 PM	H2 MFC set to  0.000000
12/12/2010	7:28:08 PM	BCl3 MFC set to  0.000000
12/12/2010	7:28:08 PM	PHl3 MFC set to  0.000000
12/12/2010	7:28:08 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:28:08 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:28:08 PM	Tube furnace set to 0
12/12/2010	7:29:08 PM	H2 valve closed
12/12/2010	7:29:08 PM	BCl3 valve closed
12/12/2010	7:29:08 PM	PH3 valve closed
12/12/2010	7:29:08 PM	SiCl4 pre valve closed
12/12/2010	7:29:08 PM	SiCl4 post valve closed
12/12/2010	7:29:08 PM	Bubbler valve closed
12/12/2010	7:29:08 PM	Helium valve opened
12/12/2010	7:29:08 PM	Main Vac valve opened
12/12/2010	7:29:08 PM	Bypass valve opened
12/12/2010	7:29:08 PM	Helium MFC set to  100.000000
12/12/2010	7:29:08 PM	H2 MFC set to  0.000000
12/12/2010	7:29:08 PM	BCl3 MFC set to  0.000000
12/12/2010	7:29:08 PM	PHl3 MFC set to  0.000000
12/12/2010	7:29:08 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:29:08 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:29:08 PM	Tube furnace set to 0
12/12/2010	7:30:08 PM	Helium valve closed
12/12/2010	7:30:08 PM	H2 valve closed
12/12/2010	7:30:08 PM	BCl3 valve closed
12/12/2010	7:30:08 PM	PH3 valve closed
12/12/2010	7:30:08 PM	SiCl4 pre valve closed
12/12/2010	7:30:08 PM	SiCl4 post valve closed
12/12/2010	7:30:08 PM	Bubbler valve closed
12/12/2010	7:30:08 PM	Main Vac valve opened
12/12/2010	7:30:08 PM	Bypass valve opened
12/12/2010	7:30:08 PM	Helium MFC set to  0.000000
12/12/2010	7:30:08 PM	H2 MFC set to  0.000000
12/12/2010	7:30:08 PM	BCl3 MFC set to  0.000000
12/12/2010	7:30:08 PM	PHl3 MFC set to  0.000000
12/12/2010	7:30:08 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:30:08 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:30:09 PM	Tube furnace set to 0
12/12/2010	7:31:09 PM	H2 valve closed
12/12/2010	7:31:09 PM	BCl3 valve closed
12/12/2010	7:31:09 PM	PH3 valve closed
12/12/2010	7:31:09 PM	SiCl4 pre valve closed
12/12/2010	7:31:09 PM	SiCl4 post valve closed
12/12/2010	7:31:09 PM	Bubbler valve closed
12/12/2010	7:31:09 PM	Helium valve opened
12/12/2010	7:31:09 PM	Main Vac valve opened
12/12/2010	7:31:09 PM	Bypass valve opened
12/12/2010	7:31:09 PM	Helium MFC set to  100.000000
12/12/2010	7:31:09 PM	H2 MFC set to  0.000000
12/12/2010	7:31:09 PM	BCl3 MFC set to  0.000000
12/12/2010	7:31:09 PM	PHl3 MFC set to  0.000000
12/12/2010	7:31:09 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:31:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:31:09 PM	Tube furnace set to 0
12/12/2010	7:32:09 PM	Helium valve closed
12/12/2010	7:32:09 PM	H2 valve closed
12/12/2010	7:32:09 PM	BCl3 valve closed
12/12/2010	7:32:09 PM	PH3 valve closed
12/12/2010	7:32:09 PM	SiCl4 pre valve closed
12/12/2010	7:32:09 PM	SiCl4 post valve closed
12/12/2010	7:32:09 PM	Bubbler valve closed
12/12/2010	7:32:09 PM	Main Vac valve opened
12/12/2010	7:32:09 PM	Bypass valve opened
12/12/2010	7:32:09 PM	Helium MFC set to  0.000000
12/12/2010	7:32:09 PM	H2 MFC set to  0.000000
12/12/2010	7:32:09 PM	BCl3 MFC set to  0.000000
12/12/2010	7:32:09 PM	PHl3 MFC set to  0.000000
12/12/2010	7:32:09 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:32:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:32:09 PM	Tube furnace set to 0
12/12/2010	7:33:09 PM	H2 valve closed
12/12/2010	7:33:09 PM	BCl3 valve closed
12/12/2010	7:33:09 PM	PH3 valve closed
12/12/2010	7:33:09 PM	SiCl4 pre valve closed
12/12/2010	7:33:09 PM	SiCl4 post valve closed
12/12/2010	7:33:09 PM	Bubbler valve closed
12/12/2010	7:33:09 PM	Helium valve opened
12/12/2010	7:33:09 PM	Main Vac valve opened
12/12/2010	7:33:09 PM	Bypass valve opened
12/12/2010	7:33:09 PM	Helium MFC set to  100.000000
12/12/2010	7:33:09 PM	H2 MFC set to  0.000000
12/12/2010	7:33:09 PM	BCl3 MFC set to  0.000000
12/12/2010	7:33:09 PM	PHl3 MFC set to  0.000000
12/12/2010	7:33:09 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:33:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:33:09 PM	Tube furnace set to 0
12/12/2010	7:34:09 PM	Helium valve closed
12/12/2010	7:34:09 PM	H2 valve closed
12/12/2010	7:34:09 PM	BCl3 valve closed
12/12/2010	7:34:09 PM	PH3 valve closed
12/12/2010	7:34:09 PM	SiCl4 pre valve closed
12/12/2010	7:34:09 PM	SiCl4 post valve closed
12/12/2010	7:34:09 PM	Bubbler valve closed
12/12/2010	7:34:09 PM	Main Vac valve opened
12/12/2010	7:34:09 PM	Bypass valve opened
12/12/2010	7:34:09 PM	Helium MFC set to  0.000000
12/12/2010	7:34:09 PM	H2 MFC set to  0.000000
12/12/2010	7:34:09 PM	BCl3 MFC set to  0.000000
12/12/2010	7:34:09 PM	PHl3 MFC set to  0.000000
12/12/2010	7:34:09 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:34:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:34:09 PM	Tube furnace set to 0
12/12/2010	7:35:09 PM	H2 valve closed
12/12/2010	7:35:09 PM	BCl3 valve closed
12/12/2010	7:35:09 PM	PH3 valve closed
12/12/2010	7:35:09 PM	SiCl4 pre valve closed
12/12/2010	7:35:09 PM	SiCl4 post valve closed
12/12/2010	7:35:09 PM	Bubbler valve closed
12/12/2010	7:35:09 PM	Helium valve opened
12/12/2010	7:35:09 PM	Main Vac valve opened
12/12/2010	7:35:09 PM	Bypass valve opened
12/12/2010	7:35:09 PM	Helium MFC set to  100.000000
12/12/2010	7:35:09 PM	H2 MFC set to  0.000000
12/12/2010	7:35:09 PM	BCl3 MFC set to  0.000000
12/12/2010	7:35:09 PM	PHl3 MFC set to  0.000000
12/12/2010	7:35:09 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:35:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:35:10 PM	Tube furnace set to 0
12/12/2010	7:36:10 PM	Helium valve closed
12/12/2010	7:36:10 PM	H2 valve closed
12/12/2010	7:36:10 PM	BCl3 valve closed
12/12/2010	7:36:10 PM	PH3 valve closed
12/12/2010	7:36:10 PM	SiCl4 pre valve closed
12/12/2010	7:36:10 PM	SiCl4 post valve closed
12/12/2010	7:36:10 PM	Bubbler valve closed
12/12/2010	7:36:10 PM	Main Vac valve opened
12/12/2010	7:36:10 PM	Bypass valve opened
12/12/2010	7:36:10 PM	Helium MFC set to  0.000000
12/12/2010	7:36:10 PM	H2 MFC set to  0.000000
12/12/2010	7:36:10 PM	BCl3 MFC set to  0.000000
12/12/2010	7:36:10 PM	PHl3 MFC set to  0.000000
12/12/2010	7:36:10 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:36:10 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:36:10 PM	Tube furnace set to 0
12/12/2010	7:36:11 PM	Run finished at 7:36 PM
12/12/2010	7:36:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/12/2010	7:37:55 PM	Recipe started at 7:37 PM
12/12/2010	7:37:55 PM	Helium valve closed
12/12/2010	7:37:55 PM	BCl3 valve closed
12/12/2010	7:37:55 PM	PH3 valve closed
12/12/2010	7:37:55 PM	SiCl4 pre valve closed
12/12/2010	7:37:55 PM	SiCl4 post valve closed
12/12/2010	7:37:55 PM	Main Vac valve closed
12/12/2010	7:37:55 PM	Bypass valve closed
12/12/2010	7:37:55 PM	Bubbler valve closed
12/12/2010	7:37:55 PM	H2 valve opened
12/12/2010	7:37:55 PM	Helium MFC set to  0.000000
12/12/2010	7:37:55 PM	H2 MFC set to  500.000000
12/12/2010	7:37:55 PM	BCl3 MFC set to  0.000000
12/12/2010	7:37:55 PM	PHl3 MFC set to  0.000000
12/12/2010	7:37:55 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:37:55 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:37:55 PM	Tube furnace set to 0
12/12/2010	7:39:13 PM	Helium valve closed
12/12/2010	7:39:13 PM	BCl3 valve closed
12/12/2010	7:39:13 PM	PH3 valve closed
12/12/2010	7:39:13 PM	SiCl4 pre valve closed
12/12/2010	7:39:13 PM	SiCl4 post valve closed
12/12/2010	7:39:13 PM	Main Vac valve closed
12/12/2010	7:39:13 PM	Bypass valve closed
12/12/2010	7:39:13 PM	H2 valve opened
12/12/2010	7:39:13 PM	Bubbler valve opened
12/12/2010	7:39:13 PM	Helium MFC set to  0.000000
12/12/2010	7:39:13 PM	H2 MFC set to  500.000000
12/12/2010	7:39:13 PM	BCl3 MFC set to  0.000000
12/12/2010	7:39:13 PM	PHl3 MFC set to  0.000000
12/12/2010	7:39:13 PM	SiCl4 MFC set to  0.000000
12/12/2010	7:39:13 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:39:13 PM	Tube furnace set to 1050
12/12/2010	7:59:13 PM	Helium valve closed
12/12/2010	7:59:13 PM	BCl3 valve closed
12/12/2010	7:59:13 PM	PH3 valve closed
12/12/2010	7:59:13 PM	Main Vac valve closed
12/12/2010	7:59:13 PM	Bypass valve closed
12/12/2010	7:59:13 PM	H2 valve opened
12/12/2010	7:59:13 PM	SiCl4 pre valve opened
12/12/2010	7:59:13 PM	SiCl4 post valve opened
12/12/2010	7:59:13 PM	Bubbler valve opened
12/12/2010	7:59:13 PM	Helium MFC set to  0.000000
12/12/2010	7:59:13 PM	H2 MFC set to  500.000000
12/12/2010	7:59:13 PM	BCl3 MFC set to  0.000000
12/12/2010	7:59:13 PM	PHl3 MFC set to  0.000000
12/12/2010	7:59:13 PM	SiCl4 MFC set to  50.000000
12/12/2010	7:59:13 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	7:59:13 PM	Tube furnace set to 1050
12/12/2010	8:19:13 PM	H2 valve closed
12/12/2010	8:19:13 PM	BCl3 valve closed
12/12/2010	8:19:13 PM	PH3 valve closed
12/12/2010	8:19:13 PM	SiCl4 pre valve closed
12/12/2010	8:19:13 PM	SiCl4 post valve closed
12/12/2010	8:19:13 PM	Main Vac valve closed
12/12/2010	8:19:13 PM	Bypass valve closed
12/12/2010	8:19:13 PM	Helium valve opened
12/12/2010	8:19:13 PM	Bubbler valve opened
12/12/2010	8:19:13 PM	Helium MFC set to  500.000000
12/12/2010	8:19:13 PM	H2 MFC set to  0.000000
12/12/2010	8:19:13 PM	BCl3 MFC set to  0.000000
12/12/2010	8:19:13 PM	PHl3 MFC set to  0.000000
12/12/2010	8:19:13 PM	SiCl4 MFC set to  0.000000
12/12/2010	8:19:13 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	8:19:13 PM	Tube furnace set to 0
12/12/2010	8:39:13 PM	Helium valve closed
12/12/2010	8:39:13 PM	H2 valve closed
12/12/2010	8:39:13 PM	BCl3 valve closed
12/12/2010	8:39:13 PM	PH3 valve closed
12/12/2010	8:39:13 PM	SiCl4 pre valve closed
12/12/2010	8:39:13 PM	SiCl4 post valve closed
12/12/2010	8:39:13 PM	Main Vac valve closed
12/12/2010	8:39:13 PM	Bypass valve closed
12/12/2010	8:39:13 PM	Bubbler valve closed
12/12/2010	8:39:13 PM	Helium MFC set to  0.000000
12/12/2010	8:39:13 PM	H2 MFC set to  0.000000
12/12/2010	8:39:13 PM	BCl3 MFC set to  0.000000
12/12/2010	8:39:13 PM	PHl3 MFC set to  0.000000
12/12/2010	8:39:13 PM	SiCl4 MFC set to  0.000000
12/12/2010	8:39:13 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	8:39:13 PM	Tube furnace set to 0
12/12/2010	8:39:14 PM	Run finished at 8:39 PM
12/12/2010	10:41:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2010	10:41:32 PM	Recipe started at 10:41 PM
12/12/2010	10:41:32 PM	H2 valve closed
12/12/2010	10:41:32 PM	BCl3 valve closed
12/12/2010	10:41:32 PM	PH3 valve closed
12/12/2010	10:41:32 PM	SiCl4 pre valve closed
12/12/2010	10:41:32 PM	SiCl4 post valve closed
12/12/2010	10:41:32 PM	Main Vac valve closed
12/12/2010	10:41:32 PM	Bypass valve closed
12/12/2010	10:41:32 PM	Bubbler valve closed
12/12/2010	10:41:32 PM	Helium valve opened
12/12/2010	10:41:32 PM	Helium MFC set to  500.000000
12/12/2010	10:41:32 PM	H2 MFC set to  0.000000
12/12/2010	10:41:32 PM	BCl3 MFC set to  0.000000
12/12/2010	10:41:32 PM	PHl3 MFC set to  0.000000
12/12/2010	10:41:32 PM	SiCl4 MFC set to  0.000000
12/12/2010	10:41:32 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	10:41:32 PM	Tube furnace set to 0
12/12/2010	10:41:37 PM	Helium valve closed
12/12/2010	10:41:37 PM	H2 valve closed
12/12/2010	10:41:37 PM	BCl3 valve closed
12/12/2010	10:41:37 PM	PH3 valve closed
12/12/2010	10:41:37 PM	SiCl4 pre valve closed
12/12/2010	10:41:37 PM	SiCl4 post valve closed
12/12/2010	10:41:37 PM	Main Vac valve closed
12/12/2010	10:41:37 PM	Bypass valve closed
12/12/2010	10:41:37 PM	Bubbler valve closed
12/12/2010	10:41:37 PM	Helium MFC set to  0.000000
12/12/2010	10:41:37 PM	H2 MFC set to  0.000000
12/12/2010	10:41:37 PM	BCl3 MFC set to  0.000000
12/12/2010	10:41:37 PM	PHl3 MFC set to  0.000000
12/12/2010	10:41:37 PM	SiCl4 MFC set to  0.000000
12/12/2010	10:41:37 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	10:41:37 PM	Tube furnace set to 0
12/12/2010	10:41:38 PM	Run finished at 10:41 PM
12/12/2010	10:41:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2010	10:44:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2010	10:44:16 PM	Recipe started at 10:44 PM
12/12/2010	10:44:16 PM	Helium valve closed
12/12/2010	10:44:16 PM	H2 valve closed
12/12/2010	10:44:16 PM	BCl3 valve closed
12/12/2010	10:44:16 PM	PH3 valve closed
12/12/2010	10:44:16 PM	SiCl4 pre valve closed
12/12/2010	10:44:16 PM	SiCl4 post valve closed
12/12/2010	10:44:16 PM	Main Vac valve closed
12/12/2010	10:44:16 PM	Bubbler valve closed
12/12/2010	10:44:16 PM	Bypass valve opened
12/12/2010	10:44:16 PM	Helium MFC set to  0.000000
12/12/2010	10:44:16 PM	H2 MFC set to  0.000000
12/12/2010	10:44:16 PM	BCl3 MFC set to  0.000000
12/12/2010	10:44:16 PM	PHl3 MFC set to  0.000000
12/12/2010	10:44:16 PM	SiCl4 MFC set to  0.000000
12/12/2010	10:44:16 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	10:44:17 PM	Tube furnace set to 0
12/12/2010	10:45:10 PM	Helium valve closed
12/12/2010	10:45:10 PM	H2 valve closed
12/12/2010	10:45:10 PM	BCl3 valve closed
12/12/2010	10:45:10 PM	PH3 valve closed
12/12/2010	10:45:10 PM	SiCl4 pre valve closed
12/12/2010	10:45:10 PM	SiCl4 post valve closed
12/12/2010	10:45:10 PM	Bubbler valve closed
12/12/2010	10:45:10 PM	Main Vac valve opened
12/12/2010	10:45:10 PM	Bypass valve opened
12/12/2010	10:45:10 PM	Helium MFC set to  0.000000
12/12/2010	10:45:10 PM	H2 MFC set to  0.000000
12/12/2010	10:45:10 PM	BCl3 MFC set to  0.000000
12/12/2010	10:45:10 PM	PHl3 MFC set to  0.000000
12/12/2010	10:45:10 PM	SiCl4 MFC set to  0.000000
12/12/2010	10:45:10 PM	Bypass solenoid MFC set to  0.000000
12/12/2010	10:45:11 PM	Tube furnace set to 0
12/12/2010	10:45:11 PM	Run finished at 10:45 PM
12/12/2010	10:45:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
